價格
電議
型號
631
品牌
MKS
所在地
四川省 成都市
更新時間
2024-04-28 14:54:59
瀏覽次數
次
美國MKS*電容壓力計 MKS 631系列高溫*電容壓力計
631d是高溫電容壓力計，萬機儀器過10年前推出RoHS版本。這些器件工作在非常高的內部溫度，減少過程的副產物沉積在傳感器，它幾乎消除了由污染引起的輸出漂移。現有的工作溫度是150 C或200°°C，允許使用在*苛刻的真空半導體制造過程中如金屬蝕刻氮化硅薄膜的化學氣相沉積（CVD）。新的包裝減少至少40%的所需安裝空間量，使它在設計新系統或改造現有的設備更容易。
The 631D is completely self-contained requiring only input power of ±15VDC for operation. No separate electronics modules are used which both reduces the amount of installation space needed and provides better performance due to elimination of noisegenerating interconnecting cables. Its Inconel® sensor offers extremely high resistance to corrosion and its overpressure rating of 45 psia ensures good repeatability and stability regardless of the system operating conditions. The Type 631D high-performance analog electronics also include fail-safe overtemperature protection and LED status lamps to indicate its operating state. An internally-mounted set of two (2) UL-approved solid-state trip relays for pressure and one (1) UL-approved electromechanical relay for heater failure is also available allowing the manometer to control external equipment or components. The pressure trip relays may be adjusted by the user independently at atmospheric pressure eliminating the need for vacuum pumps during setpoint adjustment.
該631d是完全獨立的，需要±15VDC只有輸入功率運行。不使用單獨的電子模塊，既減少了安裝空間的需要和提供更好的性能由于noisegenerating互連電纜的消除。它的鉻鎳鐵合金®傳感器提供了非常高的耐腐蝕性，其壓等級45磅/平方英寸確保良好的重復性和穩定性無論系統的操作條件。631d型高性能模擬電子還包括安全過熱保護和LED狀態燈指示其操作狀態。一個內部安裝的兩（2）UL的壓力和一個固態跳閘繼電器（1）UL批準加熱器故障的機電式繼電器，是可用的，允許壓力控制外部設備或部件。壓力脫扣繼電器可由用戶調整獨立在大氣壓力設定值調整，消除過程中真空泵需要。
美國MKS*電容壓力計 MKS 631系列高溫*電容壓力計Features & Benefits:特點和優點：
?Operating temperatures reduce contamination
?操作溫度，減少污染
?Compact design & self-contained electronics save space
?緊湊的設計和完備的電子節省空間
?Inconel® sensor resists corrosion
?Inconel®傳感器抗腐蝕
?Insensitive to gas composition
?不敏感的氣體組合物
?Performance is unaffected by pressure bursts
?性能不受壓力脈沖
?Optional pressure trip relays (2) for controlling external equipment
?可選跳閘繼電器（2）控制外部設備
美國MKS*電容壓力計 MKS 631系列高溫*電容壓力計Applications:應用：
The 631D Baratron High Temperature Manometer is found in demanding vacuum processes for semiconductor manufacturing such as
本公司631d高溫壓力計是發現在苛刻的真空的半導體制造過程，如金屬蝕刻氮化硅薄膜的化學氣相沉積（CVD）。這也是一個用于生物制藥加工設備如機和消毒，使用蒸汽防止細菌生長的理想選擇。
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美國MKS*電容壓力計 MKS 631系列高溫*電容壓力計
631d是高溫電容壓力計，萬機儀器過10年前推出RoHS版本。這些器件工作在非常高的內部溫度，減少過程的副產物沉積在傳感器，它幾乎消除了由污染引起的輸出漂移。現有的工作溫度是150 C或200°°C，允許使用在*苛刻的真空半導體制造過程中如金屬蝕刻氮化硅薄膜的化學氣相沉積（CVD）。新的包裝減少至少40%的所需安裝空間量，使它在設計新系統或改造現有的設備更容易。
The 631D is completely self-contained requiring only input power of ±15VDC for operation. No separate electronics modules are used which both reduces the amount of installation space needed and provides better performance due to elimination of noisegenerating interconnecting cables. Its Inconel® sensor offers extremely high resistance to corrosion and its overpressure rating of 45 psia ensures good repeatability and stability regardless of the system operating conditions. The Type 631D high-performance analog electronics also include fail-safe overtemperature protection and LED status lamps to indicate its operating state. An internally-mounted set of two (2) UL-approved solid-state trip relays for pressure and one (1) UL-approved electromechanical relay for heater failure is also available allowing the manometer to control external equipment or components. The pressure trip relays may be adjusted by the user independently at atmospheric pressure eliminating the need for vacuum pumps during setpoint adjustment.
該631d是完全獨立的，需要±15VDC只有輸入功率運行。不使用單獨的電子模塊，既減少了安裝空間的需要和提供更好的性能由于noisegenerating互連電纜的消除。它的鉻鎳鐵合金®傳感器提供了非常高的耐腐蝕性，其壓等級45磅/平方英寸確保良好的重復性和穩定性無論系統的操作條件。631d型高性能模擬電子還包括安全過熱保護和LED狀態燈指示其操作狀態。一個內部安裝的兩（2）UL的壓力和一個固態跳閘繼電器（1）UL批準加熱器故障的機電式繼電器，是可用的，允許壓力控制外部設備或部件。壓力脫扣繼電器可由用戶調整獨立在大氣壓力設定值調整，消除過程中真空泵需要。
美國MKS*電容壓力計 MKS 631系列高溫*電容壓力計Features & Benefits:特點和優點：
?Operating temperatures reduce contamination
?操作溫度，減少污染
?Compact design & self-contained electronics save space
?緊湊的設計和完備的電子節省空間
?Inconel® sensor resists corrosion
?Inconel®傳感器抗腐蝕
?Insensitive to gas composition
?不敏感的氣體組合物
?Performance is unaffected by pressure bursts
?性能不受壓力脈沖
?Optional pressure trip relays (2) for controlling external equipment
?可選跳閘繼電器（2）控制外部設備
美國MKS*電容壓力計 MKS 631系列高溫*電容壓力計Applications:應用：
The 631D Baratron High Temperature Manometer is found in demanding vacuum processes for semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD). It is also an ideal choice for use in biopharmaceutical processing equipment such as lyophilizers and sterilizers that use steam to prevent bacteria growth.
本公司631d高溫壓力計是發現在苛刻的真空的半導體制造過程，如金屬蝕刻氮化硅薄膜的化學氣相沉積（CVD）。這也是一個用于生物制藥加工設備如機和消毒，使用蒸汽防止細菌生長的理想選擇。
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